
速解
Accelerate Failure Analysis
Precision Solutions for Faster Turnaround
Sanyu Co., Ltd.
About Us
Precision Equipment for Science and Semiconductor Analysis
Founded in 1946, Sanyu is a Japanese manufacturer of precision equipment for scientific and semiconductor applications.
Building on decades of precision machining expertise, we design and manufacture electron microscope accessories, semiconductor failure analysis tools, plasma processing systems, and analytical instrument components.
Our integrated capabilities cover design, development, machining, assembly, adjustment, and evaluation.

Do you have any troubles like these?
✓ Is lengthy FIB processing slowing down your failure analysis workflow?
✓ Do you need to check polishing progress without repeatedly moving the sample between systems?
✓ Are you concerned about damaging or losing valuable defective or prototype samples during preparation?
✓ Does sample preparation quality vary depending on the operator?
Let us handle it!
Our Strength
Integrated Engineering for Reliable Precision Equipment
From Concept to Complete Equipment
Design, precision machining, assembly, adjustment, and evaluation are handled through an integrated in-house system.
Precision Backed by Evaluation
Our development facilities include electron microscopes and laser microscopes for evaluating micro- and nano-scale results.
Flexible Manufacturing
We support custom requirements, small-lot production, and volume production through multiple manufacturing facilities in Japan.
Faster Sample Preparation. More Efficient Failure Analysis.
ELLMID DG300
Localized Polishing System for Semiconductor Failure Analysis
Failure analysis requires precise sample preparation before microscopic observation or FIB processing. ELLMID locally polishes the target area and exposes the layer to be analyzed with high precision. By removing material close to the target layer before FIB processing, it reduces FIB workload, protects valuable samples, and helps shorten the overall turnaround time of failure analysis.KEY BENEFITS
1.Reduce FIB Processing Time
Localized mechanical polishing removes unnecessary material before final FIB processing.2.Inspect While You Polish
The integrated microscope enables operators to adjust the polishing position and immediately check the result without moving the sample to another system.3.Protect Valuable Samples
Only the required area is polished, reducing unnecessary damage and loss of valuable defective devices.4.Improve Repeatability
Up to 12 parameter sets can be stored and recalled, supporting repeatable preparation and reducing operator-dependent variation.APPLICATIONS
・ Semiconductor device failure analysis
・ Targeted layer exposure
・ Sample preparation before FIB processing
・ Research and development of semiconductor materials
・ Preparation of valuable defective or prototype devices
Promotion Video

Service
BUSINESS ACTIVITIES
Semiconductor Failure Analysis Equipment
Sample preparation and micro-processing systems for faster, more reliable failure analysis.
Electron Microscope Accessories
Precision stages, holders, and manipulation systems for microscopic observation and evaluation.
Precision Equipment Manufacturing
Integrated support from mechanical design and precision machining to assembly and adjustment.
Main Products
MAIN PRODUCTS
ELLMID DG300
Localized polishing system for semiconductor failure analysis
TP-50B
Benchtop plasma etching system for localized processing
AP-1000
Precision polishing system for package opening and surface preparation
Nano-Manipulation Stage
Precision positioning and micro-manipulation system for SEM applications
Minimal Microplasma Etching System
Compact etching system for minimal-fab applications
Electron Microscope Accessories
Custom stages and TEM holders for observation and evaluation
Company
Sanyu Co., Ltd.
457 Baba-cho, Hitachiota, Ibaraki 313-0004, Japan
Phone +81-294-72-2245
Company Profile
Corporate Website
https://sunyou-ss.co.jp/Integrated Manufacturing & Quality Management
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Reliable Equipment Built Through an Integrated System
Sanyu manages design, precision machining, assembly, adjustment, and evaluation through an integrated manufacturing system in Japan.
Our facilities include a Class 1,000 cleanroom and advanced evaluation equipment, including scanning electron microscopes, transmission electron microscopes, and laser microscopes.
Our quality management system is certified to ISO 9001:2015, supporting consistent quality from development through manufacturing and inspection.
If you have any questions or concerns about our products, please feel free to contact us.
Contact usSanyu Co., Ltd.
457 Baba-cho, Hitachiota, Ibaraki 313-0004, Japan
Phone +81-294-72-2245
